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High-rate deposition of amorphous silicon films using hot-wire CVD with a coil-shaped filament
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Povolny, Henry S.
Deng, Xunming
publication date
2003
webpage
http://dx.doi.org/10.1016/s0040-6090(03)00090-7
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
4
start page
125
end page
129
volume
430
issue
1-2