Kinetics of silicon film growth and the deposition phase diagram Article (Web of Science)

authors

  • Ferreira, G.M.
  • Ferlauto, A.S.
  • Chen, Chi
  • Koval, R.J.
  • Pearce, J.M.
  • Ross, C.
  • Wronski, C.R.
  • Collins, Robert W

publication date

  • 2004

published in

number of pages

  • 5

start page

  • 13

end page

  • 18

volume

  • 338-340