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Kinetics of silicon film growth and the deposition phase diagram
Article (Web of Science)
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Additional Document Info
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authors
Ferreira, G.M.
Ferlauto, A.S.
Chen, Chi
Koval, R.J.
Pearce, J.M.
Ross, C.
Wronski, C.R.
publication date
2004
webpage
http://dx.doi.org/10.1016/j.jnoncrysol.2004.02.013
published in
JOURNAL OF NON-CRYSTALLINE SOLIDS
Journal
Additional Document Info
number of pages
5
start page
13
end page
18
volume
338-340