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Surface, interface, and bulk properties of amorphous carbon films characterized byinsituellipsometry
Article (Web of Science)
Overview
Additional Document Info
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Overview
publication date
1988
webpage
http://dx.doi.org/10.1063/1.99570
published in
APPLIED PHYSICS LETTERS
Journal
Additional Document Info
number of pages
2
start page
2025
end page
2027
volume
52
issue
24