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Advances in multichannel spectroscopic ellipsometry
Article (Web of Science)
Overview
Additional Document Info
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authors
An, Ilsin
Fujiwara, H
Lee, Joungchel
Lu, Yiwei
Koh, Joohyun
Rovira, P.I
publication date
1998
webpage
http://dx.doi.org/10.1016/s0040-6090(97)00764-5
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
14
start page
18
end page
32
volume
313-314