Advances in multichannel spectroscopic ellipsometry Article (Web of Science)

authors

  • Collins, Robert W
  • An, Ilsin
  • Fujiwara, H
  • Lee, Joungchel
  • Lu, Yiwei
  • Koh, Joohyun
  • Rovira, P.I

publication date

  • 1998

published in

number of pages

  • 14

start page

  • 18

end page

  • 32

volume

  • 313-314