Real-time and spectroscopic ellipsometry characterizatio of diamond and diamond-like carbon Article (Web of Science)

authors

  • Cong, Y
  • Kim, Y.-T
  • Vedam, K
  • Liou, Y
  • Inspektor, A
  • Messier, R

publication date

  • 1989

webpage

published in

number of pages

  • 13

start page

  • 565

end page

  • 578

volume

  • 181

issue

  • 1-2