Oxidation and etching of hydrogenated amorphous silicon; An in situ ellipsometry study Article (Web of Science)

authors

  • Huang, C.-Y.
  • Windischmann, H.

publication date

  • 1985

webpage

published in

number of pages

  • 9

start page

  • 289

end page

  • 298

volume

  • 12

issue

  • 4