Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry Article (Web of Science)

authors

  • Collins, Robert W
  • Ferlauto, A.S.
  • Ferreira, G.M.
  • Chen, Chi
  • Koh, Joohyun
  • Koval, R.J.
  • Lee, Yeeheng
  • Pearce, J.M.
  • Wronski, C.R.

publication date

  • 2003

number of pages

  • 37

start page

  • 143

end page

  • 180

volume

  • 78

issue

  • 1-4