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Microcrystalline Silicon Films Deposited by Cathode‐Type RF Glow Discharge Technique
Article (Web of Science)
Overview
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Overview
authors
Jayatissa, Ahalapitiya H
Nakanishi, Yoichiro
Hatanaka, Yosinori
publication date
1995
webpage
http://dx.doi.org/10.1149/1.2048635
published in
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Journal
Additional Document Info
number of pages
3
start page
1663
end page
1666
volume
142
issue
5