Multichannel Mueller Matrix Ellipsometry for Simultaneous Real-Time Measurement of Bulk Isotropic and Surface Anisotropic Complex Dielectric Functions of Semiconductors Article (Web of Science)

authors

  • Chen, Chi
  • An, Ilsin

publication date

  • 2003

webpage

published in

start page

  • 217402

volume

  • 90

issue

  • 21