Microstructural evolution of ultrathin amorphous silicon films by real-time spectroscopic ellipsometry Article (Web of Science)

authors

  • An, Ilsin
  • Nguyen, H. V.
  • Nguyen, N. V.

publication date

  • 1990

webpage

published in

number of pages

  • 3

start page

  • 2274

end page

  • 2277

volume

  • 65

issue

  • 18