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Microstructural evolution of ultrathin amorphous silicon films by real-time spectroscopic ellipsometry
Article (Web of Science)
Overview
Additional Document Info
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authors
An, Ilsin
Nguyen, H. V.
Nguyen, N. V.
publication date
1990
webpage
http://dx.doi.org/10.1103/physrevlett.65.2274
published in
PHYSICAL REVIEW LETTERS
Journal
Additional Document Info
number of pages
3
start page
2274
end page
2277
volume
65
issue
18