Simultaneous real‐time spectroscopic ellipsometry and reflectance for monitoring thin‐film preparation Article (Web of Science)

authors

  • An, Ilsin
  • Nguyen, H. V.
  • Heyd, A. R.

publication date

  • 1994

webpage

published in

number of pages

  • 11

start page

  • 3489

end page

  • 3500

volume

  • 65

issue

  • 11