Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon Article (Web of Science)

authors

  • Cong, Y.
  • An, I.
  • Vedam, K.
  • Witham, H.S.
  • Pilione, L.J.
  • Messier, R.

publication date

  • 1990

published in

number of pages

  • 9

start page

  • 361

end page

  • 370

volume

  • 193-194