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Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
Article (Web of Science)
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authors
Cong, Y.
An, I.
Vedam, K.
Witham, H.S.
Pilione, L.J.
Messier, R.
publication date
1990
webpage
http://dx.doi.org/10.1016/s0040-6090(05)80046-x
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
9
start page
361
end page
370
volume
193-194