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Instrumentation considerations in multichannel ellipsometry for real-time spectroscopy
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
An, Ilsin
Cong, Yue
Nguyen, N.V.
Pudliner, B.S.
publication date
1991
webpage
http://dx.doi.org/10.1016/0040-6090(91)90439-5
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
5
start page
300
end page
305
volume
206
issue
1-2