Instrumentation considerations in multichannel ellipsometry for real-time spectroscopy Article (Web of Science)

authors

  • An, Ilsin
  • Cong, Yue
  • Nguyen, N.V.
  • Pudliner, B.S.

publication date

  • 1991

webpage

published in

number of pages

  • 5

start page

  • 300

end page

  • 305

volume

  • 206

issue

  • 1-2