Nucleation and growth of hydrogenated amorphous silicon‐carbon alloys: Effect of hydrogen dilution in plasma‐enhanced chemical vapor deposition Article (Web of Science)

authors

  • Lu, Yiwei
  • An, Ilsin
  • Gunes, M.
  • Wakagi, M.
  • Wronski, C. R.

publication date

  • 1993

webpage

published in

number of pages

  • 2

start page

  • 2228

end page

  • 2230

volume

  • 63

issue

  • 16