Cubic beta-WNx layers: Growth and properties vs N-to-W ratio Article (Web of Science)

cited authors

  • Ozsdolay, B. D.; Mulligan, C. P.; Balasubramanian, K.; Huang, Liping; Khare, S. V.; Gall, D.

authors

publication date

  • October 25, 2016

webpage

published in

author keyword

  • Cubic
  • Density functional calculations
  • Hardness
  • Lattice constant
  • Nitrogen vacancy
  • Tungsten nitride

category

start page

  • 98

end page

  • 107

volume

  • 304