IN-SITU AND EX-SITU STUDIES OF MOLYBDENUM THIN FILMS DEPOSITED BY RF AND DC MAGNETRON SPUTTERING Proceedings Paper (Web of Science)

cited authors

  • Khatri, H.; Collins, R. W.; Marsillac, S.; IEEE

publication date

  • January 1, 2010

webpage

start page

  • 2463

end page

  • 2465