Calibration-free multichannel ellipsometry for retardance measurement

Article (Web of Science), Proceedings Paper (Web of Science)

• cited authors: An, I; Kyung, JS; Bang, KY; Kim, OK; Oh, HK; Collins, RW
• publication date: June 1, 2005
• webpage: Web of Science
• published in: JOURNAL OF THE KOREAN PHYSICAL SOCIETY Journal

author keyword

• ellipsometry
• retardance
• rubbing

• category: PHYSICS, MULTIDISCIPLINARY Category
• start page: S142
• end page: S145
• volume: 46