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Impact of hydrogen dilution on microstructure and optoelectronic properties of silicon films deposited using tirisilane
Article (Web of Science)
International Collaboration
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cited authors
Du, WH; Yang, XS; Povolny, H; Liao, XB; Deng, XM
authors
Deng, Xunming
publication date
March 21, 2005
webpage
Web of Science
published in
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Journal
Research
category
PHYSICS, APPLIED
Category
Additional Document Info
start page
838
end page
842
volume
38
issue
6