Impact of hydrogen dilution on microstructure and optoelectronic properties of silicon films deposited using tirisilane Article (Web of Science)

International Collaboration

cited authors

  • Du, WH; Yang, XS; Povolny, H; Liao, XB; Deng, XM

authors

publication date

  • March 21, 2005

webpage

published in

category

start page

  • 838

end page

  • 842

volume

  • 38

issue

  • 6