Spectroscopic Ellipsometry and Optimized B-Spline Coefficients of Non-hydrogenated Amorphous Silicon for Amorphous Silicon-Based Semiconductors Article (Web of Science)

cited authors

  • Ebdah, M. A.; Kordesch, M. E.; Jadwisienczak, W. M.; Ibdah, A.

publication date

  • July 1, 2025

webpage

published in

category

keywords

  • B-spline
  • Spectroscopic ellipsometry
  • amorphous silicon
  • correlation
  • optical functions

start page

  • 5630

end page

  • 5643

volume

  • 54

issue

  • 7