Real-Time Spectroscopic Ellipsometry for Flux Calibrations in Multi-Source Co-Evaporation of Thin Films: Application to Rate Variations in CuInSe₂ Deposition Article (Web of Science)

Open Access

cited authors

Sapkota, Dhurba R.; Ramanujam, Balaji; Pradhan, Puja; Alaani, Mohammed A. Razooqi; Shan, Ambalanath; Heben, Michael J.; Marsillac, Sylvain; Podraza, Nikolas J.; Collins, Robert W.

publication date

August 1, 2024

webpage

Web of Science

published in

MATERIALS Journal

category

PHYSICS, CONDENSED MATTER Category

keywords

film composition
film deposition rate
film thickness
multi-source co-evaporation
real-time spectroscopic ellipsometry
thin film deposition
thin film deposition calibration

volume

17

issue

16