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Copper tantalum nitride (CuTaN
2
) thin films prepared by reactive radio-frequency magnetron sputtering
Article (Web of Science)
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Research
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Overview
cited authors
Islam, Md Maidul; Ranga, Abhishek Goud; Borra, Vamsi; Georgiev, Daniel G.
publication date
June 1, 2024
webpage
Web of Science
published in
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Journal
Research
category
PHYSICS, APPLIED
Category
keywords
Band gap
Copper tantalum nitride
RF reactive sputtering
Raman spectroscopy
Resistivity measurements
Scanning electron microscopy
Thin films
X-ray diffraction
Additional Document Info
volume
130
issue
6