Optical properties of pulsed dc magnetron sputtered thin film tantalum nitride by spectroscopic ellipsometry Article (Web of Science)

cited authors

  • Shrestha, Bishal; Jaszewski, Samantha T.; Ihlefeld, Jon F.; Wolfley, Steve L.; David Henry, M.; Podraza, Nikolas J.

publication date

  • June 1, 2023

webpage

published in

category

keywords

  • Tantalum nitride
  • complex dielectric function
  • complex index of refraction
  • spectroscopic ellipsometry

volume

  • 30

issue

  • 1