A Comprehensive Circuit Modeling Approach for Self-Sustained Capacitively Coupled Microwave Plasmas Article (Web of Science)

cited authors

  • Ramesh, Sandeep Narasapura; Semnani, Abbas

publication date

  • September 1, 2021

webpage

published in

category

keywords

  • Capacitively coupled
  • Dielectrics
  • Discharges (electric)
  • Integrated circuit modeling
  • Mathematical model
  • Microwave circuits
  • Microwave theory and techniques
  • Plasmas
  • equivalent circuit model
  • microwave discharge
  • plasma diagnostics
  • self-sustained

start page

  • 2690

end page

  • 2699

volume

  • 49

issue

  • 9