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A Comprehensive Circuit Modeling Approach for Self-Sustained Capacitively Coupled Microwave Plasmas
Article (Web of Science)
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Overview
cited authors
Ramesh, Sandeep Narasapura; Semnani, Abbas
publication date
September 1, 2021
webpage
Web of Science
published in
IEEE TRANSACTIONS ON PLASMA SCIENCE
Journal
Research
category
PHYSICS, FLUIDS & PLASMAS
Category
keywords
Capacitively coupled
Dielectrics
Discharges (electric)
Integrated circuit modeling
Mathematical model
Microwave circuits
Microwave theory and techniques
Plasmas
equivalent circuit model
microwave discharge
plasma diagnostics
self-sustained
Additional Document Info
start page
2690
end page
2699
volume
49
issue
9