Plasma-Based Power Limitation for Highly Linear MEMS Switch Protection and Isolation Enhancement Article (Web of Science)

Open Access

cited authors

  • Vander Missen, Zach; Semnani, Abbas; Peroulis, Dimitrios

publication date

  • January 1, 2020

webpage

published in

category

keywords

  • Discharges (electric)
  • High-power
  • Linearity
  • MEMS
  • Microswitches
  • Plasma measurements
  • Plasmas
  • Semiconductor device measurement
  • linearity
  • plasma
  • switch

start page

  • 173103

end page

  • 173111

volume

  • 8