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Plasma-Based Power Limitation for Highly Linear MEMS Switch Protection and Isolation Enhancement
Article (Web of Science)
Open Access
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Research
Additional Document Info
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cited authors
Vander Missen, Zach; Semnani, Abbas; Peroulis, Dimitrios
publication date
January 1, 2020
webpage
Web of Science
published in
IEEE ACCESS
Journal
Research
category
TELECOMMUNICATIONS
Category
keywords
Discharges (electric)
High-power
Linearity
MEMS
Microswitches
Plasma measurements
Plasmas
Semiconductor device measurement
linearity
plasma
switch
Additional Document Info
start page
173103
end page
173111
volume
8