Laser-Based Fabrication of Microstructures on Nickel Thin Films and Its Applications in On-Chip Thin Film Inductors Article (Web of Science)

cited authors

  • Itapu, Srikanth; Borra, Vamsi; Georgiev, Daniel G.

publication date

  • January 1, 2020

webpage

published in

category

keywords

  • Films
  • Inductance
  • Inductors
  • Nickel
  • Radiation effects
  • Spirals
  • Sputtering
  • microstructuring
  • nanosecond laser irradiation
  • nickel thin films
  • on-chip spiral inductor
  • vacuum evaporation

start page

  • 455

end page

  • 460

volume

  • 19