Shear thickening and shear-induced agglomeration of chemical mechanical polishing slurries using electrolytes Article (Faculty180)

cited authors

  • Crawford, N. C.; Yohe, B.; Williams, S.; Boldridge, D.; Liberatore, M. W.

authors

publication date

  • 2013

published in

start page

  • 499

end page

  • 513

volume

  • 52