CVD polymers for devices and device fabrication Article (Faculty180)

cited authors

  • Wang, Minghui; Wang, Xiaoxue; Moni, Priya; Liu, Andong; Kim, Do Han; Jo, Won Jun; Sojoudi, Hossein; Gleason, Karen K

authors

publication date

  • 2017

published in

start page

  • 1604606

volume

  • 29