An ellipsometry study of a hydrogenated amorphous silicon basedn‐istructure Article (Web of Science)

authors

  • Clark, A. H.
  • Guha, S.
  • Huang, C.‐Y.

publication date

  • 1985

webpage

published in

number of pages

  • 5

start page

  • 4566

end page

  • 4571

volume

  • 57

issue

  • 10