Intrinsic stress in diamond films prepared by microwave plasma CVD Article (Web of Science)

authors

  • Windischmann, H.
  • Epps, Glenn F.
  • Cong, Yue

publication date

  • 1991

webpage

published in

number of pages

  • 6

start page

  • 2231

end page

  • 2237

volume

  • 69

issue

  • 4