Insituellipsometry comparison of the nucleation and growth of sputtered and glow‐dischargea‐Si:H Article (Web of Science)

authors

  • Cavese, J. M.

publication date

  • 1987

webpage

published in

number of pages

  • 7

start page

  • 4146

end page

  • 4153

volume

  • 62

issue

  • 10