Evolution of the optical functions of thin-film aluminum: A real-time spectroscopic ellipsometry study Article (Web of Science)

authors

  • Nguyen, Hien V.
  • An, Ilsin

publication date

  • 1993

webpage

published in

number of pages

  • 18

start page

  • 3947

end page

  • 3965

volume

  • 47

issue

  • 7