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Evolution of the optical functions of aluminum films during nucleation and growth determined by real-time spectroscopic ellipsometry
Article (Web of Science)
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Additional Document Info
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Overview
authors
Nguyen, H. V.
An, Ilsin
publication date
1992
webpage
http://dx.doi.org/10.1103/physrevlett.68.994
published in
PHYSICAL REVIEW LETTERS
Journal
Additional Document Info
number of pages
3
start page
994
end page
997
volume
68
issue
7