Evolution of the optical functions of aluminum films during nucleation and growth determined by real-time spectroscopic ellipsometry Article (Web of Science)

authors

  • Nguyen, H. V.
  • An, Ilsin

publication date

  • 1992

webpage

published in

number of pages

  • 3

start page

  • 994

end page

  • 997

volume

  • 68

issue

  • 7