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Interface formation and microstructural evolution ina‐Si: H/a‐SiNx: H heterostructures
Article (Web of Science)
Overview
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Overview
publication date
1986
webpage
http://dx.doi.org/10.1063/1.337314
published in
JOURNAL OF APPLIED PHYSICS
Journal
Additional Document Info
number of pages
6
start page
1377
end page
1383
volume
60
issue
4