Shear thickening of chemical mechanical polishing slurries under high shear Article (Web of Science)

authors

  • Crawford, Nathan C.
  • Williams, S. Kim R.
  • Boldridge, David

publication date

  • 2012

published in

number of pages

  • 10

start page

  • 637

end page

  • 647

volume

  • 51

issue

  • 7