Chemical equilibration of plasma-deposited amorphous silicon with thermally generated atomic hydrogen Article (Web of Science)

authors

  • An, Ilsin
  • Li, Y. M.
  • Wronski, C. R.

publication date

  • 1993

webpage

published in

number of pages

  • 8

start page

  • 4464

end page

  • 4472

volume

  • 48

issue

  • 7