Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth Article (Web of Science)

authors

  • Lee, Joungchel
  • Rovira, P. I.
  • An, Ilsin

publication date

  • 1998

webpage

published in

number of pages

  • 10

start page

  • 1800

end page

  • 1810

volume

  • 69

issue

  • 4