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Surface roughness evolution on glow dischargea‐Si:H
Note (Web of Science)
Overview
Additional Document Info
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Overview
authors
Cavese, J. M.
publication date
1987
webpage
http://dx.doi.org/10.1063/1.338059
published in
JOURNAL OF APPLIED PHYSICS
Journal
Additional Document Info
number of pages
2
start page
1662
end page
1664
volume
61
issue
4