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A Comprehensive Circuit Modeling Approach for Self-Sustained Capacitively Coupled Microwave Plasmas
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Ramesh, Sandeep Narasapura
Semnani, Abbas
publication date
2021
webpage
http://dx.doi.org/10.1109/tps.2021.3105642
published in
IEEE TRANSACTIONS ON PLASMA SCIENCE
Journal
Additional Document Info
number of pages
9
start page
2690
end page
2699
volume
49
issue
9