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Plasma-Based Power Limitation for Highly Linear MEMS Switch Protection and Isolation Enhancement
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Missen, Zach Vander
Semnani, Abbas
Peroulis, Dimitrios
publication date
2020
webpage
http://dx.doi.org/10.1109/access.2020.3024760
published in
IEEE ACCESS
Journal
Additional Document Info
number of pages
8
start page
173103
end page
173111
volume
8