Alignment and calibration of the MgF_2 biplate compensator for applications in rotating-compensator multichannel ellipsometry Article (Web of Science)

authors

  • Lee, Joungchel
  • Rovira, P. I.
  • An, Ilsin

publication date

  • 2001

start page

  • 1980

volume

  • 18

issue

  • 8