Error correction for calibration and data reduction in rotating-polarizer ellipsometry: applications to a novel multichannel ellipsometer Article (Web of Science)

authors

  • Nguyen, N. V.
  • Pudliner, B. S.
  • An, Ilsin

publication date

  • 1991

webpage

published in

start page

  • 919

volume

  • 8

issue

  • 6