Shear thickening and shear-induced agglomeration of chemical mechanical polishing slurries using electrolytes Article (Web of Science)

authors

  • Crawford, Nathan C.
  • Yohe, Benjamin
  • Kim, S.
  • Williams, R.
  • Boldridge, David

publication date

  • 2013

published in

number of pages

  • 14

start page

  • 499

end page

  • 513

volume

  • 52

issue

  • 5