Absolute orientation-dependent TiN() step energies from two-dimensional equilibrium island shape and coarsening measurements on epitaxial TiN() layers Article (Web of Science)

authors

  • Kodambaka, S.
  • Khare, Sanjay
  • Petrova, V.
  • Vailionis, A.
  • Petrov, I.
  • Greene, J.E.

publication date

  • 2002

published in

number of pages

  • 6

start page

  • 468

end page

  • 474

volume

  • 513

issue

  • 3