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Automatic rotating element ellipsometers: Calibration, operation, and real‐time applications
Article (Web of Science)
Overview
Additional Document Info
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Overview
publication date
1990
webpage
http://dx.doi.org/10.1063/1.1141417
published in
REVIEW OF SCIENTIFIC INSTRUMENTS
Journal
Additional Document Info
number of pages
33
start page
2029
end page
2062
volume
61
issue
8