Shear thickening and defect formation of fumed silica CMP slurries Article (Web of Science)

authors

  • Crawford, Nathan C.
  • Williams, S. Kim R.
  • Boldridge, David

publication date

  • 2013

webpage

published in

number of pages

  • 9

start page

  • 87

end page

  • 96

volume

  • 436