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CVD of Alumina on Carbon and Silicon Carbide Microfiber Substrates for Microelectrode Development
Article (Web of Science)
Overview
Additional Document Info
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authors
Giolando, D.M.
Kirchhoff, Jon R
Mueller, H.
Nguyen, P.Q.
Odeh, I.N.
publication date
2002
webpage
http://dx.doi.org/10.1002/1521-3862(20020503)8:3<93::aid-cvde93>3.0.co;2-b
published in
Chemical Vapor Deposition
Journal
Additional Document Info
number of pages
5
start page
93
end page
98
volume
8
issue
3