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Influence of substrate structure on the growth of hydrogenated amorphous silicon studied byinsituellipsometry
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Cavese, J. M.
publication date
1986
webpage
http://dx.doi.org/10.1063/1.337501
published in
JOURNAL OF APPLIED PHYSICS
Journal
Additional Document Info
number of pages
7
start page
4169
end page
4176
volume
60
issue
12